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Metal Impurities in Silicon-Device Fabrication

Metal Impurities in Silicon-Device Fabrication

Klaus Graff

132,55 €
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Editorial:
Springer Nature B.V.
Año de edición:
2014
Materia
Ingeniería: general
ISBN:
9783540642138

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Otros libros del autor

  • Metal Impurities in Silicon-Device Fabrication
    Klaus Graff
    This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and ra...
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