LIBROS DEL AUTOR: klaus graff

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  • Metal Impurities in Silicon-Device Fabrication
    Klaus Graff
    This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and ra...
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