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Metal Impurities in Silicon-Device Fabrication

Metal Impurities in Silicon-Device Fabrication

Klaus Graff

133,90 €
IVA incluido
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Editorial:
Springer Nature B.V.
Año de edición:
2012
Materia
Ingeniería: general
ISBN:
9783642629655
133,90 €
IVA incluido
Disponible

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Sobre IBD

This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables.

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