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Technologien der Mikrosysteme

Technologien der Mikrosysteme

Ha Duong Ngo

48,02 €
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Editorial:
Springer Nature B.V.
Año de edición:
2023
Materia
Ingeniería mecánica
ISBN:
9783658374976
48,02 €
IVA incluido
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Sobre IBD

Das Buch vermittelt die Grundlagen zur Herstellung und dem Aufbau von Mikrosystemen. Es kann in zwei Teile aufgeteilt werden. Der Schwerpunkt von Teil I liegt hierbei auf den Mikrofertigungsprozessen und behandelt die Siliziumtechnologie, mikromechanische Strukturierungs- (anisotropes Ätzen, DRIE) und Bondprozesse (Eutectic Bonding, Fusion Bonding). Teil II behandelt die Aufbau- und Verbindungstechnik für Mikrosysteme und vermittelt Kenntnisse zu den Prinzipien der Chipmontage. Dabei stehen u.a. die Beschichtungstechnologien (Metallisierungssysteme) und Kontaktiertechnologien (Löten, Kleben, Bonden) im Vordergrund.

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