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Epitaxie von Metallaufdampfschichten

Epitaxie von Metallaufdampfschichten

Ludwig Reimer

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Editorial:
Springer Nature B.V.
Año de edición:
1967
Materia
Ciencia: cuestiones generales
ISBN:
9783663062899
72,39 €
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Unter Epitaxie versteht man das orientierte Aufwachsen dünner Schichten auf einer kristallinen Unterlage. Im Idealfall erreicht man einkristalline Schichten, welche die Kristallorientierung der Unterlage fortsetzen. Bei der Aufdampf­ methode muß man in der Regel erhöhte Temperaturen der Unterlage während des Aufdampfprozesses anwenden, um Epitaxie zu erreichen. In vielen Fällen spielen auch Adsorptionsschichten auf den kristallinen Unterlagen eine Rolle. Zum Bei­ spiel wurde in der vorliegenden Arbeit die Epitaxie von Eisenschichten auf Stein­ salz-Spaltflächen durch den H 0-Partialdruck begünstigt. 2 Das praktische Interesse an einkristallinen Schichten beruht darauf, daß deren physikalische Eigenschaften besser mit denen des kompakten Materials zu ver­ gleichen sind als polykristalline Schichten mit regelloser Kristallorientierung, die man beim Aufdampfen auf amorpher Unterlage (Glas oder Kunststoff-Folien) er­ hält. In der vorliegenden Arbeit sind die Bedingungen untersucht, unter denen ein­ kristalline Wismut- und Eisen-Aufdampfschichten zu erhalten sind. Wismut zeigt wegen seiner Grenzstellung zwischen Metallen und Halbleitern einen relativ großen Hall-Effekt, der außerdem sehr anisotrop ist und in Abhängigkeit von der Orientierung das Vorzeichen wechseln kann. Den hohen Hall-Koeffizienten kann man zur Messung magnetischer Felder mit Hall-Sonden ausnutzen. Um den Ein­ fluß einer abnehmenden Schichtdicke auf den Hall-Effekt zu untersuchen, war es erwünscht, auch Messungen an einkristallinen Schichten verschiedener Orien­ tierung durchzuführen. Ein positives Vorzeichen des Hall-Effektes ist zu erwarten, wenn die (lll)-Ebene parallel zur Schicht liegt und das transversale Magnetfeld in Richtung der trigonalen Achse zeigt. Derartig orientierte Schichten konnten durch Epitaxie auf Glimmer-Spaltflächen erhalten werden.

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