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Silicon Anodization as a Structuring Technique

Silicon Anodization as a Structuring Technique

Alexey Ivanov

68,84 €
IVA incluido
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Editorial:
Springer Nature B.V.
Año de edición:
2017
Materia
Ingeniería: general
ISBN:
9783658192372
68,84 €
IVA incluido
Disponible

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Sobre IBD

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. ​

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