Shape and Functional Elements of the Bulk Silicon Microtechnique

Shape and Functional Elements of the Bulk Silicon Microtechnique

Joachim Frühauf

183,36 €
IVA incluido
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Editorial:
Springer Nature B.V.
Año de edición:
2010
ISBN:
9783642060489
183,36 €
IVA incluido
Disponible

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Sobre IBD

Technological Basis of Bulk-Silicon-Microtechnique.- Orientation Dependent Etching of Silicon.- General Overview of the Shape- and Functional Elements and the Procedure of their Design.- Simple Shape Elements.- Elements for Mechanical Applications.- Elements for Fluidic Applications.- Elements for Optical Applications.

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  • Shape and Functional Elements of the Bulk Silicon Microtechnique
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