LIBROS DEL AUTOR: joachim fruhauf

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  • Shape and Functional Elements of the Bulk Silicon Microtechnique
    Joachim Frühauf
    Technological Basis of Bulk-Silicon-Microtechnique.- Orientation Dependent Etching of Silicon.- General Overview of the Shape- and Functional Elements and the Procedure of their Design.- Simple Shape Elements.- Elements for Mechanical Applications.- Elements for Fluidic Applications.- Elements for Optical Applications. ...
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    183,36 €