Prozeßtechnologie

Prozeßtechnologie

Günter Schumicki / Peter Seegebrecht

102,09 €
IVA incluido
Disponible
Editorial:
Springer Nature B.V.
Año de edición:
1991
ISBN:
9783540176701
102,09 €
IVA incluido
Disponible

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Sobre IBD

Prozeßtechnologie behandelt Fertigungsverfahren integrierter Schaltungen in CMOS-Technologie. Hierbei werden zunächst die Einzelprozesse behandelt, die der Strukturerzeugung, Strukturübertragung, Schichterzeugung und Schichtmodifikation zugerechnet werden. Im Anschluß daran wird gezeigt, wie Einzelprozesse zu einem Gesamtprozeß für die Herstellung von CMOS-Schaltungen integriert werden. Auf die Charakterisierung der Prozesse und die Entwicklung der Entwurfsregeln wird eingegangen. Das Buch basiert auf dem reichen Erfahrungsschatz fertigungsorientierter Technologen.

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