Inicio > Matemáticas y ciencia > Química > Química física > POLYSULFONES AS X-RAY RESISTS
POLYSULFONES AS X-RAY RESISTS

POLYSULFONES AS X-RAY RESISTS

Gina Calderon Wilkinson

59,86 €
IVA incluido
Disponible
Editorial:
KS OmniScriptum Publishing
Año de edición:
2009
Materia
Química física
ISBN:
9783639166484
59,86 €
IVA incluido
Disponible

Selecciona una librería:

  • Librería Samer Atenea
  • Librería Aciertas (Toledo)
  • Kálamo Books
  • Librería Perelló (Valencia)
  • Librería Elías (Asturias)
  • Donde los libros
  • Librería Kolima (Madrid)
  • Librería Proteo (Málaga)
Sobre IBD

The microlithographic process, essential in the fabrication of microdevices, uses high-energy radiation to transfer a pattern onto a thin film of polymer resist. Pattern transfer occurs by modifying the properties (solubility or volatility) of the polymer film exposed to radiation. Poly(olefin sulfones) exhibit a high sensitivity to x-rays, which is a desirable property for polymer resists used in the microlithographic process. The potential utility of these new resins prompted a study of the mechanism of degradation promoted by x-ray radiation. In this study, the effect of x-ray radiation on polysulfones with varied chemical structures was analyzed using x-ray absorption near-edge structure (XANES) spectroscopy and in-situ mass spectroscopy (MS). Interesting differences in the mode of degradation of certain poly(olefin sulfones) was observed. The results provide important groundwork for further studies of polysulfones as x-ray resists.

Artículos relacionados

  • MARIE SKLODOWSKA CURIE
    Irina Rodica Rabeja
    Marie Sklodowska Curie (7 November 1867 – 4 July 1934) was one of the greatest scientific minds that brought a fundamental contribution in science opening the door to the understanding/knowledge of the structure of the atom in the 20th century.                 Marie Sklodowska Curie’s hypothesis that the spontaneous emission of powerful rays by some chemical elements, emission ...
    Disponible

    89,28 €

  • COMPUTER SIMULATIONS OF MOLECULES AND CONDENSED MATTER
    En-Ge Wang / LI XIN-ZHENG / Xin-Zheng Li / XIN-ZHENG LI & EN-GE WANG
    This book provides a relatively complete introduction to the methods used in computational condensed matter. A wide range of electronic structure theories are introduced, including traditional quantum chemistry methods, density functional theory, many-body perturbation theory, and more. Molecular dynamics simulations are also discussed, with extensions to enhanced sampling and ...
  • APPLIED THEORETICAL ORGANIC CHEMISTRY
    DEAN J TANTILLO / TANTILLO DEAN J
    This book provides state-of-the-art information on how studies in applied theoretical organic chemistry are conducted. It highlights the many approaches and tools available to those interested in using computational chemistry to predict and rationalize structures and reactivity of organic molecules. Chapters not only describe theoretical techniques in detail, but also describe ...
  • ELECTROANALYTICAL METHODS
    S Rani
    'Electroanalytical Methods' is a pivotal text that offers a comprehensive exploration of electrochemistry and its numerous applications across a wide array of scientific disciplines, including earth science, life science, physical science, biochemistry, and pharmaceutical chemistry. This book is an invaluable resource for chemistry graduates, underlining the increasing necessit...
    Disponible

    18,75 €

  • Advances in the Preparation, Properties and Application of Polyurethane, Cellulose and Their Composites
    Due to their excellent properties, polyurethane, cellulose and their composites have become widely used in previously unimagined areas. Given the fast-increasing consumption in recent years, the demand for advanced polyurethane- and cellulose-based composites is rapidly growing. Accordingly, this Special Issue seeks to showcase research papers, short communications and review a...
  • QUANTUM FIELD THEORY
    PORTER RICHARD N / RICHARD N PORTER
    This introduction to quantum field theory (QFT) is written by a physical chemist for physical chemists, chemical physicists, and other non-physicists with knowledge of quantum theory but who want to explore ways in which they might use the power of QFT in their investigations. This book starts where many graduate courses in quantum theory that are offered to chemistry students ...