LIBROS DEL AUTOR: gina calderon wilkinson

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  • POLYSULFONES AS X-RAY RESISTS
    Gina Calderon Wilkinson
    The microlithographic process, essential in the fabrication of microdevices, uses high-energy radiation to transfer a pattern onto a thin film of polymer resist. Pattern transfer occurs by modifying the properties (solubility or volatility) of the polymer film exposed to radiation. Poly(olefin sulfones) exhibit a high sensitivity to x-rays, which is a desirable property for pol...
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