Optical Inspection of Microsystems

Optical Inspection of Microsystems

Wolfgang Osten

87,80 €
IVA incluido
Disponible
Editorial:
Taylor & Francis Ltd
Año de edición:
2019
ISBN:
9780367390570
87,80 €
IVA incluido
Disponible

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Sobre IBD

This book offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.

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