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Optical Inspection of Microsystems, Second Edition

Optical Inspection of Microsystems, Second Edition

Wolfgang Osten

434,76 €
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Editorial:
Taylor & Francis Ltd
Año de edición:
2019
Materia
Mecánica clásica
ISBN:
9781498779470

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This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS.

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