Micro and Nano Fabrication

Micro and Nano Fabrication

Hans H. Gatzen / Hans HGatzen / Jürg Leuthold / Volker Saile

160,36 €
IVA incluido
Consulta disponibilidad
Editorial:
Springer Nature B.V.
Año de edición:
2015
ISBN:
9783662443941

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Sobre IBD

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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