LIBROS DEL AUTOR: jurg leuthold

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  • Micro and Nano Fabrication
    Hans H. Gatzen / Jürg Leuthold / Volker Saile
    For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., waf...
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    124,82 €