Oluwatobi Adeleke / Sina Karimzadeh / Tien-Chien Jen
Librería Samer Atenea
Kálamo Books
Librería Perelló (Valencia)
Librería Elías (Asturias)
Librería Kolima (Madrid)
Librería Proteo (Málaga)
This book describes the application of machine learning modelling approaches in atomic layer deposition and presents detailed information on modelling, optimization, and prediction of the behaviour and characteristics of ALD for improved process quality control.