Untersuchungen von Reinheitssytemen zur Herstellung von Halbleiterprodukten

Untersuchungen von Reinheitssytemen zur Herstellung von Halbleiterprodukten

Jochen Schließer

97,74 €
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Disponible
Editorial:
Springer Nature B.V.
Año de edición:
1999
ISBN:
9783540655602
97,74 €
IVA incluido
Disponible

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Die vorliegende Arbeit entstand wahrend meiner Tatigkeit als wissenschaftlicher Mitarbeiter am Fraunhofer Institut Produktionstechnik und Automatisierung (IPA), Stuttgart. Als Danke­ schon fUr den groBen Rtickhalt wahrend des Entstehens der Arbeit widme ich das Buch meiner Frau Helen, meinen Kinder Sammy und Kim sowie meinen Eltern. Herrn Professor Dr.-Ing. Dr. h.c. E. Westkamper danke ich fUr die wohlwollende Unter­ sttitzung und Fbrderung meiner Arbeit. Mein Dank gilt auch in gleicher Weise Herrn Professor Dr. rer. nat. B. Hbfflinger ftir die Durchsicht und Ubernahme des Mitberichts. Ftir die Untersttitzung und konstruktive Diskussionen danke ich allen Kolleginnen und Kollegen. Hierbei gilt der Dank insbesondere Herrn Dr.-Ing. B. Klumpp, Herrn Dr.-Ing. M. Schweizer und Herrn Prof. Dr.-Ing. Dr. h.c. mult. R.D. Schraft. Ferner danke ich den Herren Dipl.-Ing. S. Mayer und cando mach. D. Limperich fUr die intensiven Fachgesprache, Kritik und Unterstiitzung. Einen besonderen Dank mochte ich auch den Herren Dr.-Ing. R. Kaun und Dipl.-Phys. U. Gommel ftir ihre ausdauernde Diskussions­ bereitschaft wahrend der Entstehung dieses Werkes aussprechen.

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