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Sputtering di cristalli di PbTe e ri-deposizione di specie sputate

Sputtering di cristalli di PbTe e ri-deposizione di specie sputate

Attila Csík / Dmytro Zayachuk

41,84 €
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Editorial:
KS OmniScriptum Publishing
Año de edición:
2025
Materia
Física
ISBN:
9786208945879
41,84 €
IVA incluido
Disponible

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Sono stati presi in considerazione gli sputtering delle superfici laterali dei cristalli di PbTe cresciuti dalla fusione con il metodo Bridgman mediante plasma Ar alle condizioni della spettrometria di massa neutra secondaria. Vengono presentati nuovi fenomeni - oscillazioni aperiodiche dei tassi di sputtering del Pb e del Te, enorme preferenza dello sputtering del Te che raggiunge più di due ordini di grandezza all’inizio del processo di sputtering e un significativo eccesso della resa di sputtering integrata del Te rispetto a quella del Pb per uno sputtering prolungato con plasma a bassa energia (50-160 eV). Sono state dimostrate le correlazioni tra le caratteristiche dello sputtering superficiale del cristallo PbTe e i processi di ri-deposizione delle specie sputate sulla superficie di sputtering. Si conclude che la formazione e il re-sputtering dei nuclei sub-critici della nuova fase portano a oscillazioni dei rendimenti di sputtering di Pb e Te. La formazione di strutture superficiali di dimensioni post-critiche porta a variazioni delle grandezze medie dei rendimenti di sputtering di Pb e Te. Le peculiarità degli stati di carica del Pb e del Te interstiziali nella matrice cristallina PbTe sono causate dall’enorme sputtering preferenziale del Te da parte dei fasci di ioni Ar+ a bassa energia.

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