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Rapid Thermal Processing of Semiconductors

Rapid Thermal Processing of Semiconductors

Peter J. Hesketh / Victor E. Borisenko

47,40 €
IVA incluido
Disponible
Editorial:
Springer Nature B.V.
Año de edición:
2013
Materia
Química física
ISBN:
9781489918055
47,40 €
IVA incluido
Disponible

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Sobre IBD

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

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