Protonendotierung von Silizium

Protonendotierung von Silizium

Johannes G Laven

90,90 €
IVA incluido
Disponible
Editorial:
Springer Nature B.V.
Año de edición:
2014
ISBN:
9783658073893
90,90 €
IVA incluido
Disponible

Selecciona una librería:

  • Librería Samer Atenea
  • Librería Aciertas (Toledo)
  • Kálamo Books
  • Librería Perelló (Valencia)
  • Librería Elías (Asturias)
  • Donde los libros
  • Librería Kolima (Madrid)
  • Librería Proteo (Málaga)

Johannes G. Laven beschreibt die Dotierung von kristallinem Silizium mittels Protonenimplantationen mit Energien im Bereich weniger Megaelektronenvolt. Hiermit können Dotierungsprofile in Tiefen zwischen Mikrometern bis weit über 100 µm erzeugt und modifiziert werden. Das hierzu notwendige, vergleichsweise niedrige thermische Budget macht derartige Dotierungsprofile insbesondere für die Herstellung aktueller Leistungshalbleiterbauelemente interessant. Der Autor führt die Anforderungen und Grenzen der Protonendotierung aus und zeigt ein analytisches Modell zur Berechnung von Protonen-induzierten Dotierstoffprofilen in Abhängigkeit der Implantationsparameter sowie des thermischen Budgets.

Artículos relacionados

  • LESSON FR NANOELEC (2ND ED)(P2)
    DATTA SUPRIYO / Supriyo Datta
    Everyone is familiar with the amazing performance of a modern smartphone, powered by a billion-plus nanotransistors, each having an active region that is barely a few hundred atoms long. The same amazing technology has also led to a deeper understanding of the nature of current flow and heat dissipation on an atomic scale which is of broad relevance to the general problems of n...
  • LESSON FR NANOELEC (2ND ED)(P2)
    DATTA SUPRIYO / Supriyo Datta
    Everyone is familiar with the amazing performance of a modern smartphone, powered by a billion-plus nanotransistors, each having an active region that is barely a few hundred atoms long. The same amazing technology has also led to a deeper understanding of the nature of current flow and heat dissipation on an atomic scale which is of broad relevance to the general problems of n...
    Disponible

    57,62 €

  • The HAM Operator’s Handbook
    SREEKUMAR V T / V T SREEKUMAR
    Unlock the secrets of amateur radio with 'The HAM Operator’s Handbook,' a comprehensive guide that takes you on a journey from the basics of radio communication to the cutting edge of HAM technology. Whether you’re a novice seeking to obtain your first license or a seasoned operator looking to deepen your mastery, this handbook is your essential companion in the world of amateu...
  • Delay-Adaptive Linear Control
    Miroslav Krstic / Yang Zhu
    Actuator and sensor delays are among the most common dynamic phenomena in engineering practice, and when disregarded, they render controlled systems unstable. Over the past sixty years, predictor feedback has been a key tool for compensating such delays, but conventional predictor feedback algorithms assume that the delays and other parameters of a given system are known. When ...
  • Mastering Electronics Repair
    SREEKUMAR V T / V T SREEKUMAR
    'Mastering Electronics Repair: A Practical Handbook for Beginners and Experts' is a comprehensive guide that covers everything from the basics of electronics to advanced repair techniques. Whether you’re just starting out or you’re an experienced repair expert looking to expand your skills, this book has something for you.The book begins with an introduction to basic electronic...
  • Electronics Made Easy
    SREEKUMAR V T / V T SREEKUMAR
    'Electronics Made Easy: A Beginner’s Handbook' is a comprehensive guide designed to introduce beginners to the fascinating world of electronics. This book covers everything you need to know to get started with electronics, from the basics of circuit theory to practical projects you can build at home. Whether you’re a complete novice or have some experience with electronics, thi...