Plasma Processing of Semiconductors

Plasma Processing of Semiconductors

Paul Williams

402,83 €
IVA incluido
Disponible
Editorial:
Springer Nature B.V.
Año de edición:
2012
ISBN:
9789401064866
402,83 €
IVA incluido
Disponible

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Sobre IBD

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

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