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Physics of Radiofrequency Capacitive Discharge

Physics of Radiofrequency Capacitive Discharge

V. P. Savinov

90,39 €
IVA incluido
Disponible
Editorial:
Taylor & Francis Ltd
Año de edición:
2020
Materia
Química
ISBN:
9780367571627
90,39 €
IVA incluido
Disponible

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Sobre IBD

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.

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