Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Seongbo Shim / Youngsoo Shin

134,46 €
IVA incluido
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Editorial:
Springer Nature B.V.
Año de edición:
2018
ISBN:
9783319762937

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Sobre IBD

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.

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Otros libros del autor

  • Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
    Seongbo Shim / Youngsoo Shin
    This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm tec...
    Disponible

    135,81 €