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Micro- and Nanofabrication for Beginners

Micro- and Nanofabrication for Beginners

Eiichi Kondoh

134,69 €
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Editorial:
Taylor & Francis Ltd
Año de edición:
2021
Materia
Física
ISBN:
9789814877091

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In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of 'using gases as a fabrication tool.' Necessary theories are plainly explained to help the reader learn about this new attractive field and enable further reading of specialized books.

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