MEMS and NEMS

MEMS and NEMS

Sergey Edward Lyshevski

327,84 €
IVA incluido
Disponible
Editorial:
Taylor & Francis Ltd
Año de edición:
2002
ISBN:
9780849312625
327,84 €
IVA incluido
Disponible

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The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience. Focusing on the basic theory needed to design, develop, analyze, and prototype high-performance devices, components, and structures, it shows how to analyze processes, phenomena, and properties at nano- and micro-scales and illustrates development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.

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