Introduction to Focused Ion Beam Nanometrology

Introduction to Focused Ion Beam Nanometrology

Introduction to Focused Ion Beam Nanometrology

David C. Cox / David CCox

125,54 €
IVA incluido
Disponible
Editorial:
Morgan & Claypool Publishers LLC-IOP
Año de edición:
2015
ISBN:
9781681740201
125,54 €
IVA incluido
Disponible

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This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.

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