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Crystal Growth and Evaluation of Silicon for VLSI and ULSI

Crystal Growth and Evaluation of Silicon for VLSI and ULSI

Golla Eranna

119,91 €
IVA incluido
Disponible
Editorial:
Taylor & Francis Ltd
Año de edición:
2016
Materia
Física
ISBN:
9781138034198
119,91 €
IVA incluido
Disponible

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Sobre IBD

This is one of the first books to cover the systematic growth of silicon single crystals and the complete evaluation of silicon wafers, from sand to useful wafers for device fabrication. Written for engineers and researchers in semiconductor fabrication industries, this essential reference describes techniques used to grow silicon single crystals, reviews methods to evaluate silicon wafers to determine suitability, examines the effect of intentional and unintentional impurities, explores defects found in regular silicon-crystal lattice, and discusses silicon wafer preparation for VLSI and ULSI processing.

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Otros libros del autor

  • Crystal Growth and Evaluation of Silicon for VLSI and ULSI
    Golla Eranna
    This is one of the first books to cover the systematic growth of silicon single crystals and the complete evaluation of silicon wafers, from sand to useful wafers for device fabrication. Written for engineers and researchers in semiconductor fabrication industries, this essential reference describes techniques used to grow silicon single crystals, reviews methods to evaluate si...