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CMOS Hotplate Chemical Microsensors

CMOS Hotplate Chemical Microsensors

 

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Editorial:
Springer Nature B.V.
Año de edición:
2007
Materia
Química física
ISBN:
9783540695615

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  • Librería Samer Atenea
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Sobre IBD

The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.

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