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Atomic Layer Deposition for Semiconductors

Atomic Layer Deposition for Semiconductors

Cheol Seong Hwang

208,63 €
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Editorial:
Springer Nature B.V.
Año de edición:
2013
Materia
Química física
ISBN:
9781461480532

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Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

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Otros libros del autor

  • Atomic Layer Deposition for Semiconductors
    Cheol Seong Hwang
    Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device. ...
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  • Atomic Layer Deposition for Semiconductors
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    This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. The section on ALD for memories covers both mass-produced memories, such as DRAM and Flash, and emerging memories, such as PCRAM and FeRAM. The section ...
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