LIBROS DEL AUTOR: yijian chen

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  • Micromirror Technology for Maskless Lithography
    Yijian Chen
    This book presents a complete analysis and review of dynamics, control and fabrication of MEMS micromirrors for applications in DUV and EUV maskless lithography. The transient and resonant behavior of various types of electro-mechanically damped micromirrors with various degrees of freedom are discussed. The theoretical approach using the perturbation method and linear control ...
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