LIBROS DEL AUTOR: wayne m moreau

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  • Semiconductor Lithography
    Wayne M. Moreau
    Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography. Lit...
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