LIBROS DEL AUTOR: t hattori

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  • Ultraclean Surface Processing of Silicon Wafers
    S. Heusler / T. Hattori
    A totally new concept for clean surface processing of Si wafers is introduced in this book. Some fifty distinguished researchers and engineers from the leading Japanese semiconductor companies, such as NEC, Hitachi, Toshiba, Sony and Panasonic as well as from several universities reveal to us for the first time the secrets of these highly productive i...
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    403,16 €