LIBROS DEL AUTOR: susumu namba

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  • Ion Implantation in Semiconductors
    Susumu Namba
    The technique of ion implantation has become a very useful and stable technique in the field of semiconductor device fabrication. This use of ion implantation is being adopted by industry. Another important application is the fundamental study of the physical properties of materials. The First Conference on Ion Implantation in Semiconductors was held ...
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