LIBROS DEL AUTOR: stephan abermann

1 resultados para LIBROS DEL AUTOR: stephan abermann

stephan abermann Eliminar filtro Quitar filtros
  • High-k/Metal-gate Devices for Future CMOS Technology
    Stephan Abermann
    The present work addresses the investigation of high-? dielectrics and their applicability in CMOS-devices, using metal-gate electrodes. The contents firstly include the deposition of zirconium dioxide and hafnium dioxide from the gas phase, using organometallic precursors, and their physico-chemical characterization. Furthermore, these material systems are investigated regardi...
    Disponible

    83,86 €