LIBROS DEL AUTOR: seiji samukawa

1 resultados para LIBROS DEL AUTOR: seiji samukawa

seiji samukawa Eliminar filtro Quitar filtros
  • Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System
    Seiji Samukawa
    This book provides for the first time a good understanding of the etching profile technologies that do not disturb the plasma. Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of real etching profiles based on monitoring data. Readers are made familiar with the...
    Disponible

    67,84 €