LIBROS DEL AUTOR: ranga komanduri

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  • Sensor-based Modeling and Monitoring of Chemical Mechanical Polishing
    Prahalada Rao / Ranga Komanduri / Satish Bukkapatnam
    This book provides a framework for real time control of the Chemical Mechanical Planarization (CMP) process based on combining nonlinear dynamics principles with statistical process monitoring approaches. CMP has a direct bearing on the computational speed and dimensional characteristics of solid state devices. The challenge in CMP may be narrowed to domains enveloping producti...
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