LIBROS DEL AUTOR: pilar gonzalez ruiz

1 resultados para LIBROS DEL AUTOR: pilar gonzalez ruiz

pilar gonzalez ruiz Eliminar filtro Quitar filtros
  • Poly-SiGe for MEMS-above-CMOS Sensors
    Ann Witvrouw / Kristin De Meyer / Pilar Gonzalez Ruiz
    Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with improved performance. The potential of poly-SiGe for M...
    Disponible

    134,26 €