LIBROS DEL AUTOR: martin j neumann

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  • Lithium Sputtering, Deposition and Evaporation
    Martin J. Neumann
    The ability to selectively deposit thin films of lithium and remove them from surfaces is an emerging area of technology development in va­rious fields including EUV lithography, lithium ion battery develop­ment, and in the fusion community. A lithium magnetron source was developed for lithium deposition and characterized to yield a mapping of the temperature and density of the...
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