LIBROS DEL AUTOR: maria angela pampillon arce

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  • Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
    María Ángela Pampillón Arce
    This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets. It demonstrates the possibility of depositing high permittivity materials (GdScO3) by means of high pressure sputtering from metallic targets using in situ plasma oxidatio...
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