LIBROS DEL AUTOR: m r oliver

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  • Chemical-Mechanical Planarization of Semiconductor Materials
    M.R. Oliver
    This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covere...
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    268,46 €