LIBROS DEL AUTOR: kazuo nojiri

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  • Dry Etching Technology for Semiconductors
    Kazuo Nojiri
    This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practi...
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    122,37 €