LIBROS DEL AUTOR: kamil a valiev

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  • The Physics of Submicron Lithography
    Kamil A. Valiev
    This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop­ erties of) a material i...
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    271,67 €