LIBROS DEL AUTOR: john t milek

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  • Silicon Nitride for Microelectronic Applications
    John T. Milek
    The large amount of literature on the technology of thin film silicon nitride indi­ cates the interest of the Department of Defense, NASA and the semiconductor industry in the development and full utilization of the material. This survey is concerned only with the thin film characteristics and properties of silicon nitride as currently utilized by the...
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    135,13 €