LIBROS DEL AUTOR: jihong choi

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  • Process Modeling of Chemical Mechanical Planarization
    Jihong Choi
    Chemical Mechanical Planarization (CMP) is one of the key enabling technologies for modern IC fabrication. However, mainly due to the high complexities coming from various interactions among mechanical reactions and chemical reactions, its fundamental working mechanism is still not fully understood.This book summarizes key CMP applications and challenges in modern IC fabricatio...
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    72,83 €