LIBROS DEL AUTOR: jianfeng luo

1 resultados para LIBROS DEL AUTOR: jianfeng luo

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  • Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication
    David A. Dornfeld / Jianfeng Luo
    Chemical mechanical planarization, or chemical mechanical polishing as it is simultaneously referred to, has emerged as one of the critical processes in semiconductor manufacturing and in the production of other related products and devices, MEMS for example. Since its introduction some 15+ years ago CMP, as it is commonly called, has moved steadily i...
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    207,48 €