LIBROS DEL AUTOR: jean laconte

1 resultados para LIBROS DEL AUTOR: jean laconte

  • Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
    Denis Flandre / Jean Laconte / Jean-Pierre Raskin
    I. Introduction: Context and motivations. 0.1. Why Silicon-on-Insulator technology ? 0.2. Why a thin-film membrane ? 0.3. Why co-integration and CMOS compatibility ? 0.4. Contents of the work II. Techniques and materials. 1. Silicon bulk micromachining with TMAH. 1.1. Introduction. 1.2. Generalities about silicon micromachining. 1.3. TMAH silicon etching. 1.4. Selectivity versu...
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