LIBROS DEL AUTOR: jane p chang

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  • Lecture Notes on Principles of Plasma Processing
    Francis F. Chen / Jane P. Chang
    Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied u...
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