LIBROS DEL AUTOR: james k olthoff

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  • Fundamental Electron Interactions with Plasma Processing Gases
    James K. Olthoff / Loucas G. Christophorou
    This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro­ vides an up-to-date and comprehensive account of the fundamental in­ teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary elec...
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