LIBROS DEL AUTOR: guy rabbat

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  • Handbook of Advanced Semiconductor Technology and Computer Systems
    Guy Rabbat
    Chapter I describes deposition as a basic microelectronics technique. Plasma enhanced chemical vapor deposition (PECVD) is a technique widely accepted in microelectronics for the deposition of amorphous dielectric films such as silicon nitride and silicon oxide. The main advantage of PECVD stems from the intro­ duction of plasma energy to the CVD envi...
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