LIBROS DEL AUTOR: f roozeboom

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  • Advances in Rapid Thermal and Integrated Processing
    F. Roozeboom
    Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induce...
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    550,61 €